MKS RPS AX7695 远程等离子源设备

MKS RPS AX7695 is a high-performance remote plasma source device that features high density, uniform plasma, controllable plasma parameters, stable operation, and easy maintenance. This device is widely used in various fields such as semiconductor manufacturing, photovoltaic manufacturing, display manufacturing, etc. It can be specifically used in processes such as wafer cleaning, etching, deposition, glass cleaning, coating, etching, etc.

The specific parameters of MKS RPS AX7695 include:

Frequency: 13.56 MHz
Power: 2 kW
Plasma density:>10 ^ 12 cm ^ -3
Plasma uniformity:<5%
Product dimensions: 600 mm x 400 mm x 300 mm
Weight: 20 kg
In addition, MKS RPS AX7695 also has a model as a sensor, which is a background suppression sensor. This sensor uses pulsed red LED as the light source, with a sensing distance of 30-300mm and a sensing range of 15-300mm. It also has qTeach sensing distance adjustment function, with a response time/release time of less than 1ms, and supports on/off output.

The price of MKS RPS AX7695 may vary depending on the supplier and sales channel. On some B2B platforms, such as Baidu Aigou, relevant supplier and price information can be found. For example, the price of the maintenance RPS power supply MKS Revolution III AX7695PSK-11 provided by Shenzhen Yongjiachuang Industrial Automation Co., Ltd. is 1950 yuan, with a minimum order quantity of 10 batches. The price of the RPS AX7695 original background suppression sensor provided by Xiamen Xiongba E-commerce Co., Ltd. is 1859 yuan, with a minimum order quantity of 1 piece.

Please note that the above information is for reference only, and specific product parameters and prices may vary depending on the supplier and sales channel. Before purchasing, please make sure to confirm and verify relevant information with the supplier.